Hitachi High-Tech Launches High-sensitivity and High-throughput Wafer Surface Inspection System LS9300AD for Wafer Manufacturers

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TOKYO, Mar 15, 2024 – (JCN Newswire) – Hitachi High-Tech Corporation (“Hitachi High-Tech”) announced the launch of the LS9300AD, a new system for inspecting the front and backside of non-patterned wafer surfaces for particles and defects. In addition to the conventional dark-field laser scattering detection of foreign material and defects…
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